Implementation of frequency scanning function in phase sensitive laser probe system for RF SAW/BAW devices
Implementation of frequency scanning function in phase sensitive laser probe system for RF SAW/BAW devices
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RF SAW/BAW 器件相敏激光探针系统中频率扫描功能的实现
DOI：
10.1109/ultsym.2017.8091560
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
Hashimoto Ken-ya
中科院分区：
文献类型：
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作者：
Omori Tatsuya;Suzuki Tasuku;Hashimoto Ken-ya
作者研制了一种相敏快速机械扫描激光探针系统，作为RF SAW/BAW器件的诊断工具。本文介绍了频率扫描功能在系统中的实现。对现有硬件的小修改和新开发的Windows GUI程序可以在不牺牲原有功能的情况下实现自动频率扫描操作。为了对频率扫描获得的大量数据进行后处理，开发了一种适合于批处理的数据滤波程序。作为演示，在频率跨度从820到880 [MHz]的42 YX-LiTaO 3上的单端口SAW谐振器的场分布被捕获，每0.25 MHz步进（241个频率点）。总共大约31.5小时后，我们得到了一个动画，揭示了SAW场如何随频率变化。
The authors has been developing phase-sensitive and fast mechanical scanning laser probe system as a diagnosis tool for RF SAW/BAW devices. This paper describes implementation of the frequency scanning function to the system. Little modification of the preexisting hardware and a newly developed Windows GUI program enable automated frequency scanning operation without sacrificing original functions. A data filtering program optimized for use in batch processing was newly developed for post processing of vast data acquired by the frequency scanning. As a demonstration, field distributions of a one-port SAW resonator on 42YX-LiTaO3were captured for the frequency span from 820 to 880 [MHz] with every 0.25 MHz step (241 frequency points). After around 31.5 hours in total, we got an animation revealing how SAW field changes with the frequency.