Characterization of MgxZn1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium
Characterization of MgxZn1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium
复制标题
使用双乙基环戊二烯基镁通过远程等离子体增强金属有机化学气相沉积生长的 MgxZn1-xO 薄膜的表征
DOI：
10.1143/jjap.44.7267
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发表时间：
2005
影响因子：
1.5
通讯作者：
J. Temmyo
中科院分区：
文献类型：
--
作者：
A. Nakamura;Kenji Yamamoto;J. Ishihara;T. Aoki;J. Temmyo
以二乙基锌（DEZn）和双乙基环戊二烯基镁（EtCp2Mg）为原料，采用远程等离子体增强金属有机化学气相沉积（RPE-MOCVD）技术，成功地在平面蓝宝石（112 - 0）衬底上生长出MgxZn1-xO薄膜。通过增加膜中镁的含量，晶体结构由纤锌矿转变为岩盐的混合状态。根据合金成分的不同，镁合金使薄膜的光学带隙在3.28 eV左右转变为3.69 eV。随着室温下镁含量的增加，MgxZn1-xO薄膜的光吸收边和发射峰都向高能量方向移动，表现出合金展宽。定量评价了纤锌矿MgxZn1-xO合金薄膜的Stokes位移。结果与激子局部化有关。
MgxZn1-xO films were successfully grown on a-plane sapphire (112̄0) substrates by remote-plasma-enhanced metalorganic chemical vapor-deposition (RPE-MOCVD) using diethyl zinc (DEZn) and bis-ethylcyclopentadienyl magnesium (EtCp2Mg). By increasing magnesium content in the films, the crystal structure was shifted through a mixed state from wurtzite to rock salt. The optical band-gap of the films at nearly 3.28 eV was shifted to 3.69 eV by alloying with magnesium depending on the alloy composition. Both optical absorption edges and emission peaks of MgxZn1-xO films shifted to higher energy when the magnesium content at room temperature was increased, showing alloy broadening. The Stokes' shift of wurtzite MgxZn1-xO alloy films was quantitatively evaluated. The results are relevant to exciton localization.