Repairing Damage on Ground Fused Silica by CO2 Laser Irradiation
Repairing Damage on Ground Fused Silica by CO2 Laser Irradiation
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DOI：
10.4028/www.scientific.net/amr.126-128.401
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发表时间：
2010-08
期刊：
影响因子：
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通讯作者：
Peng Yao;T. Abe;N. Yoshihara;Tianfeng Zhou;Jixin Yan;T. Kuriyagawa
中科院分区：
文献类型：
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作者：
Peng Yao;T. Abe;N. Yoshihara;Tianfeng Zhou;Jixin Yan;T. Kuriyagawa
熔融石英是紫外激光传输光学的重要材料。由于脆性高，很难以韧性方式研磨。本文采用锥度磨削法实现了初始表面为抛光表面时的延性磨削。然而，当初始表面为未抛光表面时，由于表面和亚表面损伤的存在，无法实现延性模式磨削。采用最佳激光功率和扫描速度的CO2激光对石英玻璃磨削表面损伤进行修复。通过对熔石英粘度和激光刻蚀深度的研究，确定了最佳工艺参数。除激光加工参数外，激光辐照表面的表面粗糙度还受初始表面粗糙度的影响。
Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness.