Integrated optic micropressure sensor using ring resonator
Integrated optic micropressure sensor using ring resonator
复制标题
使用环形谐振器的集成光学微压传感器
DOI：
10.1002/ecjb.4420790401
复制
发表时间：
1996
期刊：
影响因子：
--
通讯作者：
Takashi Sato
中科院分区：
文献类型：
--
作者：
M. Ohkawa;T. Abe;Seishi Sekine;Takashi Sato
本文讨论了集成光学微压力传感器的灵敏度提高问题。该传感器由膜片和环形谐振器组成，环形谐振器是一种多干涉光学电路。环形谐振器波导的一部分位于隔膜上。当对传感器施加压力时，膜片发生变形，折射率发生轻微变化，从而在膜片上传播的导波上引起相移。由这种相位变化引起的谐振频率的变化，可以检测出施加压力的大小。在本研究中，特别强调了膜片尺寸与传感器灵敏度之间的关系。通过对传感器工作原理的分析，得出除了采用类似tm的模式外，在边缘加环形谐振器波导的方形膜片最适合于高灵敏度传感器。进一步，从最小可探测压力的评价来看，有望实现对水声等低压敏感的集成光微处理器传感器。
In this paper, sensitivity improvement of integrated optic micropressure sensors is discussed. The sensor is composed of a diaphragm and a ring resonator that is a multiple interference optical circuit. A part of the waveguide of the ring resonator is on the diaphragm. When a pressure is applied to the sensor, the diaphragm is deformed and the refractive index changes slightly so that a phase shift is induced on the guided wave propagating on the diaphragm. From the change of the resonant frequency caused by this phase change, the magnitude of the applied pressure is detected. In this study, particular emphasis is on the relationship between the diaphragm dimensions and the sensor sensitivity. From the analysis of the sensor operation, it is concluded that the use of a square-shaped diaphragm with a waveguide of the ring resonator at the edge in addition to employing the TM-like mode is most suited for a highly sensitive sensor. Further, from the evaluation of the minimum detectable pressure, it is expected that an integrated optic microprocessor sensor can be realized which is sensitive to such low pressure as underwater acoustics.
DOI：
--
发表时间：
2022
期刊：
影响因子：
--
作者：
アドリアン バイエ;山田 弘明;香川 知晶;小沢 明也;今井 悠介;ONO Junichi
通讯作者：
ONO Junichi