Optically-rough and physically-flat TCO substrates for superstrate-type thin-film solar cells: sol-gel Zn1−xMgxO coating on nanoimprint patterned glass substrates
Optically-rough and physically-flat TCO substrates for superstrate-type thin-film solar cells: sol-gel Zn1−xMgxO coating on nanoimprint patterned glass substrates
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DOI：
10.1016/j.solmat.2016.11.019
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发表时间：
2017-12
影响因子：
6.9
通讯作者：
L. Meng;S. Miyajima
中科院分区：
文献类型：
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作者：
L. Meng;S. Miyajima
开发了用于薄膜太阳电池的新型光学粗糙和物理平整的透明导电氧化物(TCO)衬底。这些衬底由采用溶胶-凝胶法制备的宽禁带铝掺杂的−透明导电薄膜和采用纳米压印技术形成的周期孔阵列的玻璃衬底组成。这些衬底同时表现出低的光吸收、低的表面粗糙度、较强的光衍射行为和适中的方块电阻。AZMO涂层的层数和图形上孔特征的尺寸对这些衬底的表面粗糙度和衍射行为有显著的影响。在孔洞图案(直径=2微米，间距=2.2微米，深度=1微米)上有40层氮化钼涂层的衬底，在700微米的波长下，均方根表面粗糙度为5.5 nm，方阻为34.3Ω/sq，雾化率为11.2%。这些TCO衬底作为前电极，使氢化非晶硅单结太阳电池具有较高的开路电压(VOC=0.92V)和良好的光谱响应。这些衬底将同时实现高效的光管理和高质量的光活性材料的生长。
Novel optically-rough and physically-flat transparent conductive oxides (TCO) substrates were developed for thin-film solar cells with superstrate configuration. These substrates consist of a widegap Al doped Zn1−xMgxO (AZMO) transparent conductive thin film prepared by sol-gel process and glass substrates with periodic hole array pattern formed by a nanoimprinting technique. These substrates showed low optical absorption, low surface roughness, strong light-diffraction behavior, and moderate sheet resistance, simultaneously. The number of AZMO coating layers and the dimension of the hole feature on the pattern influenced the surface roughness and diffraction behavior of these substrates significantly. A substrate with 40 AZMO coating layers on a hole pattern (diameter=2 µm, pitch=2.2 µm, and depth=1 µm) showed a root-mean-square surface roughness of 5.5 nm, a sheet resistance of 34.3 Ω/sq, and a haze ratio of 11.2% at the wavelength of 700 nm. These TCO substrates enabled hydrogenated amorphous Si single junction solar cells with large open-circuit voltage (Voc=0.92 V) and good spectral response through acting as the front electrode. These substrates would enable an efficient light management and the growth of high quality photoactive materials, simultaneously.