Emission spectrometry for discharge plasma diagnosis

Emission spectrometry for discharge plasma diagnosis
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用于放电等离子体诊断的发射光谱法

DOI:
10.1016/s1468-6996(01)00140-1
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发表时间:
2001
影响因子:
5.5
通讯作者:
T. Oda
T. Oda
中科院分区:
材料科学2区
文献类型:
--
作者:
K. Shimizu;T. Oda

文献摘要

被引文献

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由于放电等离子体过程受气体成分的影响很大,为了了解活性物质的反应机理,进行了大气压放电发射光谱研究。本研究利用数控光谱仪和ICCD相机研究了NO分子的N2第二正带和NO-β带、NO-γ带两个带系。当介质片放置在针板式电极上时,N2第二正带和NO-γ带的发射沿电极轴向沿着方向均减少。由于介质颗粒的存在,N2第二正带与NO-γ带的发射比有显著差异。发射光谱的一维分析表明,NO-γ带和N2第二正带位于针-板电极之间,而NO-β带的发射光谱位于针电极周围。发射光谱的二维分析表明,在针-板电极之间存在NO-γ带和N2第二正带。发射光谱的时间分辨观察表明,N2第二正带发射在200ns内消失,而NO-γ带的发射持续1 μ s以上。
Emission spectrometry in the atmospheric pressure discharge was carried out to understand the reaction mechanisms of active species because the discharge plasma process is significantly affected by gas components. In this research, N 2 second positive band and two band systems of NO such as NO-β band and NO-γ band were investigated by using a digital controlled spectrometer and an ICCD camera. When the dielectric pellets were placed on the needle-plate type electrode, emissions from both N 2 second positive band and NO-γ band were reduced along the electrode axis. The emission ratio between N 2 second positive band and NO-γ band was significantly different due to the existence of dielectric pellets. One dimensional analysis of emission spectral showed that NO-γ band and N 2 second positive band lay between the needle-plate electrodes, while emission spectral of NO-β band existed around the needle electrode. Two-dimensional analysis of the emission spectrum showed that NO-γ band and N 2 second positive band exist between needle-plate electrodes. Observation by the time resolution of the emission spectrum showed that N 2 second positive band emission was extinguished within 200 ns, while that from NO-γ band continued for more than 1 μs.