Fast Pixelated Detectors in Scanning Transmission Electron Microscopy. Part II: Post-Acquisition Data Processing, Visualization, and Structural Characterization.
Fast Pixelated Detectors in Scanning Transmission Electron Microscopy. Part II: Post-Acquisition Data Processing, Visualization, and Structural Characterization.
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扫描透射电子显微镜中的快速像素化探测器。
DOI：
10.1017/s1431927620024307
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
Paterson GW
中科院分区：
文献类型：
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作者：
Paterson GW
结合直接电子检测（DED）技术的快速像素化检测器越来越被视为扫描透射电子显微镜（STEM）的通用检测器，能够在多种操作模式下成像。然而，围绕其产生的通常非常大的多维STEM数据集的采集后处理和可视化仍然存在一些问题。我们讨论这些问题，并提出开源软件库，使有效的处理和可视化的数据集。在整个过程中，我们提供了分析方法的例子，利用来自256 × 256像素Medipix 3混合DED探测器的数据，特别关注材料结构特性的STEM表征。这些技术包括虚拟探测器成像;高阶劳厄区分析;纳米束电子衍射;和扫描旋进电子衍射。在后者中，我们展示了分数精度≤6 × 10 - 4（0.06%）的纳米级晶格参数映射。
Fast pixelated detectors incorporating direct electron detection (DED) technology are increasingly being regarded as universal detectors for scanning transmission electron microscopy (STEM), capable of imaging under multiple modes of operation. However, several issues remain around the post-acquisition processing and visualization of the often very large multidimensional STEM datasets produced by them. We discuss these issues and present open source software libraries to enable efficient processing and visualization of such datasets. Throughout, we provide examples of the analysis methodologies presented, utilizing data from a 256 × 256 pixel Medipix3 hybrid DED detector, with a particular focus on the STEM characterization of the structural properties of materials. These include the techniques of virtual detector imaging; higher-order Laue zone analysis; nanobeam electron diffraction; and scanning precession electron diffraction. In the latter, we demonstrate a nanoscale lattice parameter mapping with a fractional precision ≤6 × 10−4 (0.06%).