X-ray CTR scattering and interference for atomic-scale characterization of semiconductor heterostructures
X-ray CTR scattering and interference for atomic-scale characterization of semiconductor heterostructures
复制标题
用于半导体异质结构原子级表征的 X 射线 CTR 散射和干涉
DOI:
10.1016/s0022-0248(01)01941-8
复制
发表时间:
2002
影响因子:
1.8
通讯作者:
M. Tabuchi
中科院分区:
文献类型:
--
作者:
Y. Takeda;M. Tabuchi