3-D Isotropic Tactile Microprobe Based on a Silicon Parallelogram Kinematic: From Concept to Fabrication
3-D Isotropic Tactile Microprobe Based on a Silicon Parallelogram Kinematic: From Concept to Fabrication
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DOI：
10.1109/jmems.2018.2877926
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发表时间：
2019-02-01
影响因子：
2.7
通讯作者：
Dietzel, Andreas
中科院分区：
文献类型：
--
作者：
Metz, David;Dietzel, Andreas
本文报道了一种基于单晶硅微位移机构的触觉微探针。这种运动学由三个相同平行四边形的正交级联组件制成，为微探针提供了各向同性行为。由于薄的弹性硅膜铰链，每个压电元件仅在一个方向上偏转，并且使用集成到这些铰链中的压敏电阻来识别它们的位移。宽的偏转范围，各向同性的行为，和低的机械刚度的新的微探针，通过模拟预测，可以在实验中得到验证。对第一个微探针原型的制造、组装和接触进行了优化，以允许非常紧凑地集成到空的11 mm外壳中。这使得它适用于配备传统坐标测量机的计量研究实验室和行业，甚至适用于各种其他三维力/位移测量。
This paper reports on a unique tactile microprobe based on a parallelogram kinematic made from monocrystalline silicon. This kinematic, made out of an orthogonal cascade assembly of three identical parallelograms, provides an isotropic behavior to the microprobe. Each parallelogram deflects in only one direction thanks to thin elastic silicon membrane hinges and their displacements are recognized using piezoresistors integrated into these hinges. Wide deflection ranges, isotropic behavior, and low mechanical stiffness of the new microprobe, as predicted by simulations, could be verified in experiments. The fabrication, the assembly, and the contacting of the first microprobe prototype was optimized to allow very compact integration into a empty set11 mm housing. This make it suitable for metrology research laboratories and industries equipped with conventional coordinate measurement machines and even for a variety of other 3-D force/displacement measurements.