Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy.
Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy.
复制标题
DOI：
10.1063/1.3469796
复制
发表时间：
2010-08
期刊：
影响因子：
--
通讯作者：
C. Shao;Y. Kawai;M. Esashi;T. Ono
中科院分区：
文献类型：
--
作者：
C. Shao;Y. Kawai;M. Esashi;T. Ono
在这项研究中，我们制作了一种带有弯曲电极的静电致动器探头，并评估了其在飞行时间扫描力显微镜中的适用性。在该探头中，带有尖端的悬臂梁的末端位置通过静电吸引效应进行切换，测量模式可以在质量分析和扫描力显微镜(SFM)模式之间切换。我们实现了400微米的大位移来改变工作模式。为了防止探头和弯曲电极的电气短缺，沿着弯曲电极形成了塞子。由于拉力效应，悬臂梁粘在挡块上，增加了弹簧常数和共振频率。利用所制作的探针，对具有2微米间距Au栅格的样品进行了SFM成像。
In this study, we fabricated an electrostatic actuator probe having curved electrodes and evaluated its applicability for use in time-of-flight scanning force microscopy. In this probe, the end position of a cantilever with a tip is switched through electrostatic pull-in effect; the measurement modes can be changed between mass analysis and scanning force microscopy (SFM) modes. We achieved a large displacement of 400 microm for changing working modes. To prevent electrical shortage of the probe and curved electrodes, stoppers were formed along the curved electrodes. Because of the pull-in effect, the spring constant and resonance frequency increased through stiction of the cantilever to the stoppers. Using the fabricated probe, the SFM imaging of a sample featuring a 2-microm-pitch Au grid was demonstrated.