Modelling extreme ultraviolet ablation interactions

Modelling extreme ultraviolet ablation interactions
复制标题

模拟极紫外消融相互作用

DOI:
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发表时间:
2019
期刊:
Optics + Optoelectronics
影响因子:
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通讯作者:
G. Tallents
G. Tallents
中科院分区:
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文献类型:
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作者:
J. Lolley;S. A. Wilson;G. Tallents

文献摘要

被引文献

相似文献

紧凑型极紫外 (EUV) 激光源可用于强度为 1 × 1011 Wcm−2 及更高的实验室规模烧蚀实验。使用 46.9 nm 的聚焦激光输出照射铝、金和铜的固体靶材实现的烧蚀深度已经进行了建模。考虑两个简单的模型;超短脉冲模型和消融速度模型的改编。我们表明,材料的衰减长度在烧蚀物理学中起着重要作用。更详细的一维模型包括通过逆轫致辐射吸收和光电离的吸收,经过校正以包括电子简并效应,用于评估烧蚀等离子体的不透明度和随后的烧蚀深度。
Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiments at intensities of 1 × 1011 Wcm−2 and higher. The depths of ablation achieved using focused laser output at 46.9 nm to irradiate solid targets of aluminum, gold, and copper have been modeled. Two simple models are considered; an adaptation of an ultra-short pulse model, and an ablation velocity model. We show that the attenuation length of the material plays an important role in the physics of the ablation. A more detailed one-dimensional model including absorption by inverse bremsstrahlung absorption and photo-ionization, corrected to include electron degeneracy effects, is used to evaluate the opacity of the ablation plasma and subsequent ablation depths.