Bulk Acoustic Wave Characteristics of Pseudo Lateral-Field-Excitation on LGT Single Crystal for Liquid Phase Sensing

Bulk Acoustic Wave Characteristics of Pseudo Lateral-Field-Excitation on LGT Single Crystal for Liquid Phase Sensing
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用于液相传感的 LGT 单晶伪横向场激励的体声波特性

DOI:
10.3390/s19051076
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发表时间:
2019-03
期刊:
影响因子:
3.9
通讯作者:
Zhang Chao
Zhang Chao
中科院分区:
综合性期刊3区
文献类型:
--
作者:
Xu Jiachao;Ma Tingfeng;Yan Liang;Wang Mingfei;Wang Ji;Du Jianke;Zhang Chao

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在本研究中,研究了 LGT 晶体上的伪横向场激励 (LFE) 体声波特性,以提高 LFE 器件对液体特性变化的灵敏度。伪 LFE 的 LGT 晶体的切割取向经过实验研究和验证。对于伪 LFE 模式的 LFE 器件,厚度剪切模式波是由厚度场而不是横向场激发的。目前的工作表明,当 (yxl) 13.8° LGT 板被平行于晶轴 x 的电场激发时,它以伪 LFE 模式工作。此外,还研究了器件的灵敏度和阻抗等特性。目前的工作表明,LFE 器件对水溶液电导率和介电常数变化的灵敏度分别比基于 AT 切割石英晶体的器件高 9 倍和 3.2 倍。此外,还发现 LGT LFE 传感器对液体声学粘度变化的灵敏度比 AT 切割石英传感器高 1.4 倍。该结果是使用伪 LFE 器件设计高性能液相传感器的关键基础。
In the present study, pseudo lateral-field-excitation (LFE) bulk acoustic wave characteristics on LGT crystals are investigated to increase the sensitivity of LFE devices on the liquid characteristic variations. The cut orientation of LGT crystals for pseudo-LFE is investigated and verified experimentally. For an LFE device in the pseudo-LFE mode, the thickness shear mode wave is excited by the thickness field rather than the lateral field. The present work shows that when the (yxl) 13.8° LGT plate is excited by the electric field parallel to the crystallographic axis x, it operates in the pseudo-LFE mode. Moreover, characteristics of devices including the sensitivity and impedance are investigated. The present work shows that sensitivity of LFE devices to variation of the conductivity and permittivity of the aqueous solution are 9 and 3.2 times higher than those for AT-cut quartz crystal based devices, respectively. Furthermore, it has been found that the sensitivity of the LGT LFE sensor to liquid acoustic viscosity variations is 1.4 times higher than the one for the AT-cut quartz sensor. The results are a critical basis of designing high-performance liquid phase sensors by using pseudo-LFE devices.
DOI: 10.3390/s120810604
发表时间: 2012
期刊: Sensors (Basel, Switzerland)
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发表时间: 2000-04
期刊: The Journal of the Acoustical Society of America
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