Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators
Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators
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DOI：
10.1109/jmems.2013.2286820
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发表时间：
2014-02-01
影响因子：
2.7
通讯作者：
Shkel, Andrei M.
中科院分区：
文献类型：
--
作者：
Senkal, Doruk;Ahamed, Mohammed J.;Shkel, Andrei M.
We demonstrate, for the first time, sub-1 Hz frequency symmetry in micro-glassblown wineglass resonators with integrated electrode structures. A new fabrication process based on deep glass dry etching was developed to fabricate micro-wineglasses with self-aligned stem structures and integrated electrodes. The wineglass modes were identified by electrostatic excitation and mapping the velocity of motion along the perimeter using laser Doppler interferometry. A frequency split (Delta f) of 0.15 and 0.2 Hz was demonstrated for n = 2 and n = 3 wineglass modes, respectively. To verify the repeatability of the results, a total of five devices were tested, three out of five devices showed Delta f < 5 Hz. Frequency split stayed below 1 Hz for dc bias voltages up to 100 V, confirming that the low frequency split is attributed to high structural symmetry and not to capacitive tuning. High structural symmetry (< 1 Hz) and atomically smooth surfaces (0.23 nm Sa) of the resonators may enable new classes of high performance 3-D MEMS devices, such as rate-integrating MEMS gyroscopes.
