Microcantilever Actuation by Laser Induced Photoacoustic Waves.
Microcantilever Actuation by Laser Induced Photoacoustic Waves.
复制标题
激光诱导光声波驱动微悬臂梁
DOI：
10.1038/srep19935
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发表时间：
2016-01-27
影响因子：
4.6
通讯作者：
Liu D
中科院分区：
文献类型：
--
作者：
Gao N;Zhao D;Jia R;Liu D
本文对光声波对微悬臂梁的有效激励进行了理论和实验相结合的研究。光声波是由强度调制激光引起的铝箔振动引起的。我们证明，与光热激励相比，这种新的配置避免了微悬臂梁的直接加热，从而最大限度地减少了对微悬臂梁振动的不良热效应，同时仍然保持了远程非接触激励方法的优势。我们还测量了微悬臂梁的振动幅值作为微悬臂梁与铝箔之间距离的函数，发现振幅根据反距离定律逐渐衰减。该方法具有通用性，可用于生物微机电系统（BioMEMs）中检测必须避免有害热效应的小信号。
We present here a combined theoretical and experimental investigation on effective excitation of microcantilever by using photoacoustic waves. The photoacoustic waves arose from a vibrating Al foil induced by an intensity-modulated laser. We demonstrate that, superior to photothermal excitation, this new configuration avoids direct heating of the microcantilever, thus minimizing undesired thermal effects on the vibration of microcantilever, while still keeps the advantage of being a remote, non-contact excitation method. We also measured the vibration amplitude of the microcantilever as a function of distance between the microcantilever and the Al foil and found that the amplitudes decay gradually according to the inverse distance law. This method is universal and can be adopted in bio-microelectromechanical systems (BioMEMs) for the detection of small signals where detrimental thermal effects must be avoided.