Suppression of the Transient Current of MOS Consisting of HfAlO_x as Gate Dielectrics Studied by Positron Annihilation

Suppression of the Transient Current of MOS Consisting of HfAlO_x as Gate Dielectrics Studied by Positron Annihilation
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正电子湮灭对HfAlO_x栅介质MOS瞬态电流的抑制研究

DOI:
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发表时间:
2004
期刊:
Extended Abstracts of 2004 International Workshop on Dielectric Thin Films for Future ULSI Device, May 26-28, 2004, Tokyo, Japan
影响因子:
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通讯作者:
A.Uedono et al.
A.Uedono et al.
中科院分区:
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文献类型:
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作者:
X.Li;L.Wang;T.Onda;T.Akao;M.Hayakawa;上殿明良ほか;上殿明良ほか;K.Yamabe et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;K.Yamabe et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.;A.Uedono et al.

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