Manufacturing of magnetron sputtering tungsten coatings and irradiation damage behavior under helium plasma exposure
Manufacturing of magnetron sputtering tungsten coatings and irradiation damage behavior under helium plasma exposure
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DOI:
10.1016/j.vacuum.2022.111411
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发表时间:
2022-08
期刊:
影响因子:
4
通讯作者:
Yun-feng Xu;Yue Xu;L. Luo;Xiang Zan;Yu-Cheng Wu
中科院分区:
文献类型:
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作者:
Yun-feng Xu;Yue Xu;L. Luo;Xiang Zan;Yu-Cheng Wu