Nanofabrication with a helium ion microscope
Nanofabrication with a helium ion microscope
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DOI：
10.1117/12.862438
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发表时间：
2010-03
期刊：
影响因子：
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通讯作者：
D. Maas;E. van Veldhoven;Ping Chen;V. Sidorkin;H. Salemink;E. van der Drift;P. Alkemade
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文献类型：
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作者：
D. Maas;E. van Veldhoven;Ping Chen;V. Sidorkin;H. Salemink;E. van der Drift;P. Alkemade
最近推出的氦离子显微镜（HIM）由于其亚纳米尺寸的离子探针而能够成像和制造纳米结构。氦离子与样品材料的独特相互作用提供了非常局部化的二次电子发射，从而为高分辨率成像提供了有价值的信号，并为非常精确的纳米纤维提供了机制。由于后向散射离子的产率低以及前向散射离子被限制在窄锥体中，因此低邻近效应能够实现超致密亚10纳米结构的图案化。本文介绍了各种nanofabetics的结果与直写，扫描氦离子束光刻，并与氦离子束诱导沉积。
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well as a mechanism for very precise nanofabrication. The low proximity effects, due to the low yield of backscattered ions and the confinement of the forward scattered ions into a narrow cone, enable patterning of ultra-dense sub-10 nm structures. This paper presents various nanofabrication results obtained with direct-write, with scanning helium ion beam lithography, and with helium ion beam induced deposition.