Highly sensitive SnO2 thin film NO2 gas sensor operating at low temperature
Highly sensitive SnO2 thin film NO2 gas sensor operating at low temperature
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DOI：
10.1016/j.snb.2006.11.031
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发表时间：
2007-05-21
影响因子：
8.4
通讯作者：
Bhatnagar, M. C.
中科院分区：
文献类型：
--
作者：
Kaur, Jaswinder;Roy, Somnath C.;Bhatnagar, M. C.
纯纳米晶SnO 2和不同浓度（3 wt.%）的WO 3掺杂SnO 2的薄膜和5重量%）使用溶胶-凝胶旋涂技术沉积在玻璃衬底上。利用XRD、TEM和AFM对薄膜的结构和形貌进行了研究。测试了这些薄膜对SO2、NH3、NO2和乙醇等还原性和氧化性气体的灵敏度和选择性。具有5 wt.%的SnO 2薄膜WO 3显示出对NO2的非常高的响应（（R-g - R-a）/R-a的值为四个数量级; R-g和R-a分别是在NO2和空气中的电阻）和在150 ℃的低操作温度下对NO2气体的优异选择性。讨论了WO 3对这些薄膜对NO的敏感特性的影响。(C)2006 Elsevier B. V.保留所有权利。
Thin films of pure nano-crystalline SnO2 and WO3-doped SnO2 in different concentrations (3 wt.% and 5 wt.%) are deposited using sol-gel spin coating technique on glass substrates. The structural and morphological properties of these films are investigated using XRD, TEM and AFM. The sensitivity and selectivity of these films are tested to different reducing and oxidizing gases such as SO2, NH3, NO2 and ethanol. A SnO2 thin film with 5 wt.% WO3 shows very high responses to NO2 (four orders of magnitude in the value of (R-g - R-a)/R-a; R-g and R-a are the resistance in NO2 and in air, respectively) and excellent selectivity for NO2 gas at a low operating temperature of 150 degrees C. The effect of WO3 on the sensing characteristics of these films towards NO, is discussed. (C) 2006 Elsevier B.V. All rights reserved.