Controlling of nano-network structures in BN films by a reactive plasma assisted-coating technique and the sputtering characteristics against plasma exposure
Controlling of nano-network structures in BN films by a reactive plasma assisted-coating technique and the sputtering characteristics against plasma exposure
复制标题
反应等离子体辅助涂层技术控制 BN 薄膜纳米网络结构及等离子体暴露溅射特性
DOI：
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发表时间：
2021
期刊：
影响因子：
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通讯作者：
and K. Eriguchi
中科院分区：
文献类型：
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作者：
T. Matsuda;T. Hamano;Y. Asamoto;M. Noma;S. Hasegawa;M. Yamashita K. Urabe;and K. Eriguchi
