Inverter Circuits Using ZnO Nanoparticle Based Thin-Film Transistors for Flexible Electronic Applications.
Inverter Circuits Using ZnO Nanoparticle Based Thin-Film Transistors for Flexible Electronic Applications.
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DOI：
10.3390/nano6090154
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发表时间：
2016-08-23
期刊：
影响因子：
--
通讯作者：
Hilleringmann U
中科院分区：
文献类型：
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作者：
Vidor FF;Meyers T;Hilleringmann U
科学界和几家公司正在广泛研究探索现代半导体材料的灵活性和透明度的创新系统。对于低成本生产和大表面积应用，薄膜晶体管(TFT)是驱动系统电流的关键元件。为了保持成本高效的集成过程，基于解决方案的材料被使用，因为它们在成本和系统复杂性之间表现出显著的折衷。本文讨论了以高k树脂为栅电介质的纳米级氧化锌薄膜晶体管的集成工艺。研究了器件性能与晶体管结构的关系，与共面器件相比，反向交错结构器件的性能得到了改善，场效应迁移率和离子/IOFF比都得到了提高。为了评估TFT在数字电路中的应用特性，在上拉网络中集成了负载TFT的逆变器电路，在下拉网络中集成了有源TFT。逆变器具有合理的开关特性和V/V增益。同时，分析了几何比和电源电压对器件的影响。此外，由于所有集成步骤都适用于聚合物模板，因此制造工艺与柔性衬底完全兼容。
Innovative systems exploring the flexibility and the transparency of modern semiconducting materials are being widely researched by the scientific community and by several companies. For a low-cost production and large surface area applications, thin-film transistors (TFTs) are the key elements driving the system currents. In order to maintain a cost efficient integration process, solution based materials are used as they show an outstanding tradeoff between cost and system complexity. In this paper, we discuss the integration process of ZnO nanoparticle TFTs using a high-k resin as gate dielectric. The performance in dependence on the transistor structure has been investigated, and inverted staggered setups depict an improved performance over the coplanar device increasing both the field-effect mobility and the ION/IOFF ratio. Aiming at the evaluation of the TFT characteristics for digital circuit applications, inverter circuits using a load TFT in the pull-up network and an active TFT in the pull-down network were integrated. The inverters show reasonable switching characteristics and V/V gains. Conjointly, the influence of the geometry ratio and the supply voltage on the devices have been analyzed. Moreover, as all integration steps are suitable to polymeric templates, the fabrication process is fully compatible to flexible substrates.