Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping
Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping
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DOI：
10.1088/2053-1583/1/1/011002
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发表时间：
2014-06-01
期刊：
影响因子：
5.5
通讯作者：
Steele, Gary A.
中科院分区：
文献类型：
--
作者：
Castellanos-Gomez, Andres;Buscema, Michele;Steele, Gary A.
二维晶体的确定性转移是基于二维材料人工堆叠制造异质结构的关键一步。此外，控制二维晶体的位置有利于它们在复杂设备中的集成，从而能够探索这些材料的新应用和发现新现象。迄今为止，确定性转移方法在某种程度上依赖于牺牲聚合物层和湿化学的使用。在这里，我们开发了一种全干式转印方法，该方法依赖于粘弹性印模，不采用任何湿化学步骤。发现这对于自由悬浮这些材料非常有利，因为该过程中不涉及毛细管力。此外，整个制造过程快速、高效、清洁且成品率高。
The deterministic transfer of two-dimensional crystals constitutes a crucial step towards the fabrication of heterostructures based on the artificial stacking of two-dimensional materials. Moreover, controlling the positioning of two-dimensional crystals facilitates their integration in complex devices, which enables the exploration of novel applications and the discovery of new phenomena in these materials. To date, deterministic transfer methods rely on the use of sacrificial polymer layers and wet chemistry to some extent. Here, we develop an all-dry transfer method that relies on viscoelastic stamps and does not employ any wet chemistry step. This is found to be very advantageous to freely suspend these materials as there are no capillary forces involved in the process. Moreover, the whole fabrication process is quick, efficient, clean and it can be performed with high yield.