P1B-10 Advantages of Capacitive Micromachined Ultrasonics Transducers (CMUTs) for High Intensity Focused Ultrasound (HIFU)
P1B-10 Advantages of Capacitive Micromachined Ultrasonics Transducers (CMUTs) for High Intensity Focused Ultrasound (HIFU)
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P1B-10 用于高强度聚焦超声 (HIFU) 的电容式微机械超声换能器 (CMUT) 的优势
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
B. Khuri
中科院分区：
文献类型：
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作者：
S. H. Wong;M. Kupnik;Kim Butts;B. Khuri
在过去的十年里，高强度聚焦超声（HIFU）已成为流行的微创和非侵入性治疗。传统上，压电换能器已用于HIFU应用，但电容式微机械超声换能器（CMUT）已被证明具有优点，包括易于制造和高效性能。在本文中，我们展示了专门为HIFU设计的CMUT的制造和测试。我们比较这些设计的操作与有限元模型。此外，我们证明了CMUT可以在高压和连续波（CW）条件下工作，具有最小的自加热，压电换能器经常面临的问题。最后，我们证明了MR温度监测的加热所产生的非聚焦HIFU CMUT。
In the past ten years, high intensity focused ultrasound (HIFU) has become popular for minimally invasive and non-invasive therapies. Traditionally piezoelectric transducers have been used for HIFU applications, but capacitive micro- machined ultrasonic transducers (CMUTs) have been shown to have advantages, including ease of fabrication and efficient performance. In this paper, we show the fabrication and testing of CMUTs specifically designed for HIFU. We compare the operation of these designs with finite element models. In addition, we demonstrate that CMUTs can operate under high pressure and continuous wave (CW) conditions, with minimal self-heating, a problem that piezoelectric transducers often face. Finally, we demonstrate MR-temperature monitoring of the heating created by an unfocused HIFU CMUT.