Design, Fabrication, and Operation of a Nitrogen Measurement Device Based on LTCC
Design, Fabrication, and Operation of a Nitrogen Measurement Device Based on LTCC
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基于 LTCC 的氮测量装置的设计、制造和运行
DOI：
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发表时间：
2012
期刊：
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通讯作者：
J. Muller
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文献类型：
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作者：
T. Geiling;T. Welker;J. Muller
本文介绍了一种用于测量气流中低浓度一氧化氮（NO）的微型全分析系统（μTAS）。测量原理是基于NO与臭氧（O3）的荧光反应。所提出的系统将这种测量原理按比例缩小到微流体和微传感器领域。低温共烧陶瓷（LTCC）已被证明是实现μTAS的理想技术，因为它们具有高化学和热稳定性以及高设计自由度。该系统由4个组件组成：臭氧发生器，通过紫外线传输的臭氧浓度测量，荧光检测（CLD）室和废气处理。臭氧发生器是通过介质阻挡放电（DBD）机制产生臭氧的微等离子体装置。臭氧从发生器被送入一个带有光学端口的腔室，其中浓度通过紫外线透射测量来确定。然后它被带到...
We present a so called micro total analytical system (μTAS) for the measurement of low nitrogen monoxide (NO) concentrations in gas flows. The measurement principle is based on the chemiluminescent reaction of NO with ozone (O3). The presented system scales down this measurement principle into the realm of micro fluidics and micro sensors. Low temperature co-fired ceramics (LTCC) have proven to be the ideal technology for the realization of a μTAS, as they offer high chemical and thermal stability as well as high degree of freedom of design. The system consists of 4 components: an ozone generator, an ozone concentration measurement via UV transmission, a chemiluminescent detection (CLD) chamber, and an exhaust gas treatment. The ozone generator is a micro plasma device in which ozone is produced by a dielectric barrier discharge (DBD) mechanism. From the generator the ozone is fed into a chamber with an optical port, where the concentration is determined by UV transmission measurements. Then it is brought...