Direct formation of highly porous gas-sensing films by in situ thermophoretic deposition of flame-made Pt/SnO2 nanoparticles
Direct formation of highly porous gas-sensing films by in situ thermophoretic deposition of flame-made Pt/SnO2 nanoparticles
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DOI：
10.1016/j.snb.2005.05.014
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发表时间：
2006-03-30
影响因子：
8.4
通讯作者：
Weimar, U
中科院分区：
文献类型：
--
作者：
Mädler, L;Roessler, A;Weimar, U
火焰喷雾热解（FSP）被用于一步制备纯的和掺杂铂的二氧化锡纳米粒子。通过干式FSP方法产生的气溶胶被直接原位热泳沉积到叉指状铂电极上，在活性传感器区域内形成厚度可控的多孔厚膜。使用不同的沉积时间，对于从9到40微米的所有膜厚度，都能保持氧化锡粒径（10纳米）和高的膜孔隙率（98%）。从理论上估计了膜厚度对沉积时间的依赖性，以便能够精确控制沉积过程。铂掺杂不影响二氧化锡的粒径、结晶度或多孔膜结构。这些传感器表现出高的一氧化碳（CO）传感器信号（在350℃下，干燥空气中50ppm的CO对应信号为8）、良好的重现性、高的分析灵敏度以及极低的检测限（在350℃下，干燥空气中1ppm的CO）。原位铂掺杂提高了传感器的整体性能。增加膜厚度会增加传感器电阻，并且可用于调节传感器性能。（c）2005爱思唯尔B.V. 版权所有。
Flame spray pyrolysis (FSP) was used to make pure and Pt-doped tin dioxide nanoparticles in one-step. The aerosol generated by the dry FSP method was directly, in situ thermophoretically deposited onto interdigitated Pt-electrodes to form a porous, thick film of controlled thickness within the active sensor area. Tin oxide grain size (10 nm) and a high film porosity (98%) were preserved for all film thicknesses from 9 to 40 mu m using different deposition times. The dependence of the film thickness on deposition time was theoretically estimated to enable precise control of the deposition process. Platinum doping did not affect the SnO2 grain size, crystallinity, or the porous film structure. These sensors exhibited high carbon monoxide (CO) sensor signals (8 for 50ppm CO in dry air at 350 degrees C), good reproducibility, high analytical sensitivity and a remarkably low detection limit (1 ppm CO in dry air at 350 degrees C). The in situ platinum doping enhanced the overall sensor performance. Increasing the film thickness increased the sensor resistance and can be used to tune sensor performance. (c) 2005 Elsevier B.V. All rights reserved.