Increase in Size of Flaked Particles Suddenly Generated by Impulsive Force in Mass-production Plasma Etching Equipment
Increase in Size of Flaked Particles Suddenly Generated by Impulsive Force in Mass-production Plasma Etching Equipment
复制标题
量产等离子蚀刻设备中脉冲力突然产生的片状颗粒尺寸增大
DOI：
10.3131/jvsj2.59.360
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
Fumihiko Uesugi
中科院分区：
文献类型：
--
作者：
Yuji Kasashima;Fumihiko Uesugi
