Back-side Illuminated GeSn Photodiode Array on Quartz Substrate Fabricated by Laser-induced Liquid-phase Crystallization for Monolithically-integrated NIR Imager Chip

Back-side Illuminated GeSn Photodiode Array on Quartz Substrate Fabricated by Laser-induced Liquid-phase Crystallization for Monolithically-integrated NIR Imager Chip
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用于单片集成近红外成像芯片的石英基板上的背面照明 GeSn 光电二极管阵列,采用激光诱导液相结晶技术制造

DOI:
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发表时间:
2017
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通讯作者:
and H. Watanabe
and H. Watanabe
中科院分区:
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文献类型:
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作者:
H. Oka;K. Inoue;T. T. Nguyen;S. Kuroki;T. Hosoi;T. Shimura;and H. Watanabe

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