Electron-beam-induced-current and active secondary-electron voltage-contrast with aberration-corrected electron probes.
Electron-beam-induced-current and active secondary-electron voltage-contrast with aberration-corrected electron probes.
复制标题
电子束感应电流和主动二次电子电压对比与像差校正电子探针。
作者：
Myung‐Geun Han;J. Garlow;M. Marshall;A. Tiano;Stanislaus S. Wong;S. Cheong;F. Walker;C. Ahn;Yimei Zhu
