An artificial nose based on a micromechanical cantilever array
An artificial nose based on a micromechanical cantilever array
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DOI：
10.1016/s0003-2670(99)00283-4
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发表时间：
1999-06-30
影响因子：
6.2
通讯作者：
G端ntherodt, HJ
中科院分区：
文献类型：
--
作者：
Lang, HP;Baller, MK;G端ntherodt, HJ
提出了一种基于硅微机械悬臂梁阵列的新型化学传感器。化学反应是通过对带有涂层（如金属、自组装单分子层或聚合物）的杠杆进行敏化而转换为机械响应。这是使用光束偏转技术通过顺序读出方案读出的。参考悬臂梁传感器允许减去背景信号（差分测量）。每个悬臂梁传感器的涂层与不同的敏感层允许操作的阵列设备作为一种新形式的化学鼻。氢，伯醇，天然香料和水蒸气的检测证明。我们表明，传感器响应的幅度是成比例的分析物存在的量。(C)1999 Elsevier Science B.V.保留所有权利。
A novel chemical sensor based on a micromechanical array of silicon cantilevers is presented. Chemical reactions are transduced by sensitization of cantilevers with coatings such as metals, self-assembled monolayers, or polymers into a mechanical response. This is read out using an optical beam-deflection technique by a sequential readout scheme. Reference cantilever sensors permit subtraction of background signals (differential measurement). Coating of each cantilever sensor with a different sensitive layer allows operation of the array-device as a new form of chemical nose. Detection of hydrogen, primary alcohols, natural flavors, and water vapor is demonstrated. We show that the magnitude of sensor response is proportional to the amount of analyte present. (C) 1999 Elsevier Science B.V. All rights reserved.