Fabrication of ionic polymer-metal actuator of microcantilever type
Fabrication of ionic polymer-metal actuator of microcantilever type
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DOI：
10.1109/sii.2010.5708338
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发表时间：
2010-12
期刊：
影响因子：
--
通讯作者：
I. Shimizu;K. Kikuchi;S. Tsuchitani
中科院分区：
文献类型：
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作者：
I. Shimizu;K. Kikuchi;S. Tsuchitani
在本研究中，为了开发微悬臂梁型离子聚合物金属复合材料（IPMC）致动器的制造工艺，我们评估了薄膜型IPMC的致动特性。尽管其位移小于使用商用离子聚合物（Nafion）薄膜制造的IPMC，但薄膜型IPMC的驱动得到了证实。这取决于 Nafion 层的厚度。我们可以期望实现与通过该方法制造的薄膜型微型IPMC集成的MEMS器件。
In this study, in order to develop fabrication process of ionic polymer-metal composite (IPMC) actuator of microcantilever type, we evaluated actuation characteristics of a thin film type IPMC. Though its displacement was smaller than that of IPMCs fabricated by using the commercial ionic polymer (Nafion) film, the actuation of the thin film type IPMCs was confirmed. It depended on the thickness of the Nafion layer. We can expect the realization of MEMS devices integrated with the thin film type micro IPMCs fabricated by the propose method.