Formation of periodic microswelling structures on silicone rubber surface using ArF excimer laser to realize superhydrophobic property
Formation of periodic microswelling structures on silicone rubber surface using ArF excimer laser to realize superhydrophobic property
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DOI：
10.7567/jjap.56.072002
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发表时间：
2017-07-01
影响因子：
1.5
通讯作者：
Okoshi, Masayuki
中科院分区：
文献类型：
--
作者：
Nojiri, Hidetoshi;Pambudi, Wisnu Setyo;Okoshi, Masayuki
采用193nm ArF准分子激光在硅橡胶表面诱导出周期性微膨胀结构。激光照射时，在硅橡胶表面排列直径为2.5 μ m的硅玻璃（SiO2）微球；激光束聚焦在每个微球下面的硅胶表面。通过改变氩气流量、单脉冲激光通量和激光照射时间，可以控制微膨胀结构的高度和直径。通过x射线光电子能谱分析，激光照射样品的化学键没有改变，因此仍然是硅酮。结果成功获得了高度约1.3 μ m、直径约1.3 μ m的微膨胀结构。水在微结构有机硅上的接触角可达150度甚至更大，明显表明其具有超疏水性。根据激光照射SiO2微球时聚焦点和光斑大小的变化，探讨了微膨胀形成的机理。(C) 2017 .日本应用物理学会
Periodic microswelling structures were photochemically induced on a silicone rubber surface using a 193 nm ArF excimer laser. Microspheres made of silica glass (SiO2) of 2.5 mu m diameter were aligned on the silicone rubber surface during laser irradiation; the laser beam was focused on the silicone surface underneath each microsphere. The height and diameter of the formed microswelling structures were found to be controllable by changing the Ar gas flow rate, single-pulse laser fluence, and laser irradiation time. The chemical bonding of the laser-irradiated sample did not change and thus remained to be a silicone, as analyzed by X-ray photoelectron spectroscopy. As a result, microswelling structures of approximately 1.3 mu m height and 1.3 mu m diameter were successfully obtained. The contact angles of water on the microstructured silicone were measured to be 150 degrees and larger, clearly indicating superhydrophobicity. The mechanism by which the microswellings form their shape was discussed on the basis of the changes in the focal point and spot size during laser irradiation through the SiO2 microsphere. (C) 2017 The Japan Society of Applied Physics