Active control of a pneumatic isolation table using model following control and a pressure differentiator
Active control of a pneumatic isolation table using model following control and a pressure differentiator
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DOI：
10.1016/j.precisioneng.2006.11.004
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发表时间：
2007-07-01
影响因子：
3.6
通讯作者：
Kagawa, Toshiharu
中科院分区：
文献类型：
--
作者：
Kato, Tomonori;Kawashima, Kenji;Kagawa, Toshiharu
气动隔振系统广泛应用于半导体生产工艺中。大多采用喷嘴挡板式气动伺服阀控制。然而，这些伺服阀需要较大的排气流量才能精确控制压力。本文采用模型跟踪控制方法，使用压力微分器和滑阀式伺服阀来主动控制气动隔离台。在支撑重型花岗岩床的空气弹簧系统上进行了实验，该系统的位移采用单自由度建模。本研究中获得的实验结果表明，与使用喷嘴挡板型伺服阀的传统系统相比，实现更有效的隔振系统的可能性。更具体地说，这项调查显示稳态排气流量减少了约 90%。 (c) 2007 Elsevier Inc. 保留所有权利。
Pneumatic vibration isolation systems are widely used in semiconductor production processes. Most of them are controlled with nozzle-flapper type pneumatic servo valves. However, these servo valves require large exhaust air flow rates in order to control pressure precisely.In this paper, the model following control method was applied using a pressure differentiator and a spool type servo valve to actively control a pneumatic isolation table. Experiments were carried out on an air-spring system supporting a heavy granite bed, the displacement of which was modeled with a single degree of freedom.The experimental results gained in this research demonstrate the possibility of realizing a more efficient vibration isolation system than the conventional system using nozzle-flapper type servo valves. More specifically, this investigation showed about a 90% decrease in the steady-state exhaust air flow rate. (c) 2007 Elsevier Inc. All rights reserved.