Tilting metal micro-needle fabrication based on optical vortex laser ablation
Tilting metal micro-needle fabrication based on optical vortex laser ablation
复制标题
基于光学涡旋激光烧蚀的倾斜金属微针制造
DOI：
10.1109/cleoe.2011.5943337
复制
发表时间：
2011
期刊：
影响因子：
--
通讯作者：
T.Omatsu
中科院分区：
文献类型：
--
作者：
K.Toyoda;K.Miyamoto;M.Okida;R.Morita;T.Omatsu
金属微针在纳米成像器、节能场发射显示器、生物医学纳米机电系统等领域具有广泛的应用前景。已经提出了几种用于制造金属微针的方法。然而，它们主要涉及基于若干化学过程的自下而上的技术，并且它们的时间和成本效率有限。近年来，我们提出了一种基于光涡旋脉冲激光烧蚀的金属表面微针制造新方法[1，2]。该技术能够通过仅将几个激光脉冲沉积到金属靶上来形成金属微针，显著节省了制造二维金属微针阵列的时间和成本。所得的针显示出高于靶表面的> 10 μm的高度和小于0.5 μm的尖端直径。
Metal microneedles have been attractive in many fields including nano-scopic imagers, energy-saving field emission displays, and biomedical nano-electro mechanical systems. Several methods for fabrication of metal microneedles have been proposed. However, they involve mostly a bottom-up technique based on several chemical processes, and their time and cost efficiencies are limited. In recent years, we have proposed a new method of microneedle fabrication on metal surface based on laser ablation with optical vortex pulses [1, 2]. This technique is capable of forming a metal microneedle by deposition of merely a few laser pulses onto a metal target, significantly saving the time and cost of fabrication of two-dimensional metal microneedle arrays. The resulting needles show a height of> 10 μm above the target surface and a tip diameter of less than 0.5 μm.