Micromachined in-plane tunable optical filter using thermo-optic effect
Micromachined in-plane tunable optical filter using thermo-optic effect
复制标题
利用热光效应的微机械面内可调谐光学滤波器
DOI：
10.1117/12.477918
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
J. H. Lee
中科院分区：
文献类型：
--
作者：
Sungsik Yun;J. H. Lee
本文首次提出了一种利用热光效应用于波分复用电信的微机械面内可调谐光学滤波器（TOF）。 TOF 由法布里-珀罗硅光学谐振器组成，该谐振器形成在两个基于硅/气隙对的高反射率分布式布拉格反射器之间。整个器件采用硅深反应离子蚀刻（DRIE）垂直制造。通过利用面内光纤对准，输入/输出光纤可以轻松地与基板上的 TOF 结构对准。 TOF 的可调谐性是通过加热硅谐振器对光路长度进行热调制而在实验上实现的。随着输入电压的增加，反射光谱的一个凹口会移向更长的波长，调谐范围为 9 nm，3dB 带宽为 2nm。对于调谐范围，硅谐振器的温度估计约为 93°C。
This paper presents, for the first time, a micromachined in-plane tunable optical filter (TOF) using thermo-optic effect for wavelength division multiplexed telecommunication. The TOFs are comprised of a Fabry-Perot silicon optical resonator formed between two distributed Bragg reflectors with high-reflectance based on silicon/air-gap pairs. The whole device was vertically fabricated using silicon deep reactive ion etching (DRIE). And input/output optical fibers were easily aligned along with the TOF structure on the substrate by exploiting in-plane fiber alignment. Tunability of the TOFs is experimentally achieved through thermal modulation of optical path length by heating the silicon resonator. As an input voltage increases, a notch of reflectance spectrum shifts to a longer wavelength with a tuning range of 9 nm and 3dB bandwidth of 2nm. The temperature of a silicon resonator was estimated to be about 93°C for the tuning range.