A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption
A review of capacitive MEMS hydrogen sensor using Pd‐based metallic glass with fast response and low power consumption
复制标题
快速响应、低功耗的钯基金属玻璃电容式MEMS氢传感器综述
DOI：
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发表时间：
2018
影响因子：
0.3
通讯作者：
T. Ikehashi
中科院分区：
文献类型：
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作者：
H. Yamazaki;Y. Hayashi;K. Masunishi;D. Ono;T. Ikehashi
本文报道了一种基于钯基金属玻璃（MG）的电容式MEMS氢传感器。首先，我们研究PdCuSi作为Pd基MG，并表明这种材料是有前途的电容式MEMS氢传感器。其次，我们采用钯基MG的氢传感器，具有一个倒T形电极。该传感器是由表面微机械加工工艺。我们表明，所制造的氢传感器在室温下表现出无干扰和快速响应特性。
This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.