Diamond synthesis from CO-H2 mixed gas plasma
Diamond synthesis from CO-H2 mixed gas plasma
复制标题
CO-H2混合气体等离子体合成金刚石
DOI：
10.1007/bf00585431
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发表时间：
1990
期刊：
影响因子：
--
通讯作者：
H. Miyadera
中科院分区：
文献类型：
--
作者：
Y. Saito;Kouji Sato;K. Gomi;H. Miyadera
采用微波等离子体技术，以CO-H_2混合气体为原料，在硅衬底上制备了颗粒状或膜状金刚石。用拉曼光谱测量了不含石墨和无定形碳的金刚石的生长速率，颗粒为9Μmh−1，薄膜为4Μmh−1。这些值大于CH4-H2、CH4-H2-H2O和CH3OH-H2等其他源气体系的值。CO-H_2体系中金刚石的高成形率和高质量归因于激发CO和H_2分子的反应加速了甲基自由基的生成，以及等离子体中OH自由基对副产物石墨的去除。
Particulate or film-like diamond was prepared on silicon substrates from CO-H2mixed gas using a microwave plasma technique. The growth rate of diamond without graphite and amorphous carbon, as measured by Raman spectroscopy, was 9Μm h−1for particles and 4Μmh−1for flims. These values were larger than those in other source gas systems, such as CH4-H2, CH4-H2-H2O and CH3OH-H2. The good formation rate and high quality of diamond in the CO-H2system was attributed to acceleration of methyl radical formation by the reaction of excited CO and H2molecules and removal of by-product graphite by OH radicals in the plasma.