Processing of Highly Oriented LiNbO3 Films for Waveguides from Aqueous Solution
Processing of Highly Oriented LiNbO3 Films for Waveguides from Aqueous Solution
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从水溶液中加工用于波导的高取向 LiNbO3 薄膜
DOI：
10.1111/j.1151-2916.1996.tb08595.x
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发表时间：
1996
影响因子：
3.9
通讯作者：
S. Hirano
中科院分区：
文献类型：
--
作者：
S. Ono;T. Takeo;S. Hirano
用Li和Nb氢氧化物水溶液从二元醇盐中制备了化学计量比均匀的LiNbO_3薄膜。在该方法中，双元醇盐前驱体溶液完全水解形成凝胶，再溶解到水中形成水性包衣溶液。与醇盐乙醇溶液相比，在涂层膜中碳残留物少得多的情况下，用水包衣溶液处理是可取的。经350°C热处理后，涂层薄膜具有高取向结晶，还制备了掺钛(5mol%)LiNbO_3均匀薄膜(Ti：LiNbO_3)。
Stoichiometric and homogeneous LiNbO3 films were prepared by using a Li and Nb hydroxide aqueous coating solution from a double alkoxide. In this method, a double alkoxide precursor solution was hydrolyzed completely to form the gel, which was subjected to dissolution into water to form the aqueous coating solution. Processing with the aqueous coating solution was preferable in terms of much less carbonic residue in coated films than with the alkoxide ethanol solution. The coated films crystallized with high orientation by subsequent heat-treatment at temperatures as low as 350°C. Ti-doped (5 mol%) LiNbO3 homogeneous films (Ti:LiNbO3) were also prepared.