Digital two-wavelength holographic interference microscopy for surface roughness measurement
Digital two-wavelength holographic interference microscopy for surface roughness measurement
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DOI：
10.1117/12.638915
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发表时间：
2005-08
期刊：
影响因子：
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通讯作者：
M. Ohlídal;Ludek Šír;M. Jákl;I. Ohlídal
中科院分区：
文献类型：
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作者：
M. Ohlídal;Ludek Šír;M. Jákl;I. Ohlídal
提出了一种基于合成波长数字双波长全息干涉显微术测量表面粗糙度的新方法。用CCD相机在两个波长上分步记录随机粗糙表面的两幅全息图。这两个全息图的数字重建。两个重建波得到的数字干涉。表面粗糙度参数可以从干涉图确定。
A new approach to surface roughness measurement based on the digital two-wavelength holographic interference microscopy with the synthetic wavelength is presented. Two holograms of a randomly rough surface are recorded step by step at two wavelengths by means of a CCD camera. Both holograms are numerically reconstructed. Two reconstructed waves obtained numerically interfere. The surface roughness parameters may be determined from the interferogram.