Structural and tribological characterization of multilayer ta-C films prepared by filtered cathodic vacuum arc with substrate pulse biasing
Structural and tribological characterization of multilayer ta-C films prepared by filtered cathodic vacuum arc with substrate pulse biasing
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DOI：
10.1016/s0257-8972(00)00848-3
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发表时间：
2000-10
影响因子：
5.4
通讯作者：
D. Sheeja;B. Tay;S. Lau;Xuetao Shi;X. Ding
中科院分区：
文献类型：
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作者：
D. Sheeja;B. Tay;S. Lau;Xuetao Shi;X. Ding
过滤阴极真空电弧（FCVA）技术是制备高质量硬质涂层的有效方法，但传统的浮置法制备厚的四面体非晶碳（ta-C）硬质薄膜存在局限性。目前，多层方法是克服这一限制的唯一方法，并且由于其能够制造具有不同厚度和性质的膜以适应应用而引起极大兴趣。在硅基片上制备了厚度约为1 μm的ta-C多层膜，膜厚为20 nm，膜厚为100 nm。使用曲率半径技术测量的膜的压应力，由触针轮廓，被发现是约5.4 GPa。薄膜的键结构进行了研究，使用拉曼光谱，是典型的薄膜含有相当高的sp3分数，ID/IG比约为0.265。膜的硬度和弹性模量分别为约57和550 GPa，这对于厚ta-C膜是相当高的。观察到ta-C膜对蓝宝石相对面的摩擦系数和磨损率相对较低。本研究发现，具有良好的硬度和摩擦学性能的相对较高的厚度的ta-C膜，FCVA与交替衬底脉冲偏压，可以制备。
The filtered cathodic vacuum arc (FCVA) technique is reported to be an effective method for producing high quality hard coatings, but has limitations for preparing thick hard tetrahedral amorphous carbon (ta-C) films by the conventional method of floating conditions. Currently, the multilayer approach is the only way to overcome this limitation, and is of great interest because it enables the fabrication of films with varied thickness and properties to suit the application. A multilayer ta-C film of approximately 1 μm thickness is prepared on a silicon substrate by alternate soft (20 nm thick) and hard (100 nm thick) layers of tetrahedral amorphous carbon. The compressive stress of the film measured using the radius of curvature technique, profiled by stylus, is found to be approximately 5.4 GPa. The bond structure of the film is studied using Raman spectroscopy and is typical of films containing reasonably high sp3fractions, with an ID/IGratio of approximately 0.265. The hardness and elastic modulus of the film are approximately 57 and 550 GPa, respectively, which are fairly high for thick ta-C films. The coefficient of friction and wear rate of the ta-C film against a sapphire counter-face are observed to be relatively low. This investigation finds that the ta-C films of relatively high thickness, with favourable hardness and tribological properties, can be prepared by FCVA with alternate substrate pulse biasing.