Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles
Nanostructures produced by ultraviolet laser irradiation of silicon. II. Nanoprotrusions and nanoparticles
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通过紫外线激光照射硅产生的纳米结构。
DOI：
10.1116/1.1821576
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
D. Joy
中科院分区：
文献类型：
--
作者：
Y. Guan;A. J. Pedraza;J. Fowlkes;D. Joy
利用劳氏反射镜装置，利用纳秒级紫外激光照射在硅表面衬底上制备了二维有序纳米突出阵列。这些突出物高40 ~ 70nm，底部直径约60 ~ 100nm，在许多情况下显示为规则的矩形晶格。用扫描电镜和原子力显微镜研究了它们的起源和演化。纳米突起起源于连续照射下激光诱导的周期性表面结构，在产生这些波纹的相同加工条件下。他们的演变讨论了指指不稳定性熔融硅一致的梯度表面张力由于温度梯度。温度梯度是由负责波纹形成的相同机制产生的。在稍高的激光影响下，使用单束非偏振激光观察到纳米颗粒的形成。纳米颗粒也跨越线性有序阵列…
Two-dimensional ordered nanoprotrusion arrays were produced at silicon surface substrates by nanosecond ultraviolet laser irradiation using a Lloyd’s mirror set up. These protrusions are 40 to 70nm high and have a diameter of ∼60 to 100nm at their base, and in many cases display a regular rectangular lattice. Their origin and evolution were studied using scanning electron microscopy and atomic force microscopy. Nanoprotrusions originate from a subjacent laser-induced periodic surface structure upon continuing irradiation, under the same processing conditions that produced these ripples. Their evolution is discussed in terms of fingering instabilities of melted silicon consistent with a gradient of surface tension due to a temperature gradient. The temperature gradient is produced by the same mechanism responsible for the ripple formation. At slightly higher laser fluences, nanoparticles were observed to form using a single beam of nonpolarized laser light. The nanoparticles also span a linear ordered arra...