Interferometer for pitch and yaw measurement using LC-screen and four ball lenses
Interferometer for pitch and yaw measurement using LC-screen and four ball lenses
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DOI：
10.1088/1361-6501/ab9036
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发表时间：
2020-06
影响因子：
2.4
通讯作者：
Gemba Kikuchi;R. Furutani
中科院分区：
文献类型：
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作者：
Gemba Kikuchi;R. Furutani
用于平移运动和坐标测量机托架的机床工作台的定位精度需要改进。通过将透射型液晶与偏光板组合，可以实现光的透射和阻挡。在本研究中，将该技术应用于激光干涉仪，利用一个测量系统实现选择性多自由度运动测量。采用球透镜作为反射镜，并使用光检测器测量旋转移动量。此外，使用一台干涉仪通过光的透射和阻挡选择性地测量两个自由度的旋转运动。研究发现，对于分辨率为0.0032°的测角台和分辨率为0.004°的旋转台的运动，可以利用两个球透镜轴向位移之间的差异选择性地测量俯仰和偏航旋转运动，并且当俯仰和偏航旋转运动同时施加到平台时，偏航和俯仰的串扰影响很小。因此，该技术有空间用于改进多自由度运动测量。
The positioning accuracy of machine-tool tables used for translatory movement and coordinate measuring machine carriages requires improvement. Transmission and blocking of light can be realized by combining a transmissive liquid crystal and a polarizing plate. In this study, this technique was applied to a laser interferometer to realize selective multi-degree-of-freedom motion measurement using one measurement system. A ball lens was adopted as a reflecting mirror, and the rotational-movement amount was measured using a photodetector. In addition, rotational movement with two degrees of freedom was selectively measured using one interferometer, through transmission and blocking of light. It was found that the pitch and yaw rotational movement can be selectively measured using the difference between displacements of the axial directions of two ball lenses for the movement of the goniometer stage with 0.0032° resolution and the rotational stage with 0.004° resolution, respectively, and that the influence of the crosstalk of yaw and pitch is slight when the pitch and yaw rotational movements are simultaneously applied to the stage. Therefore, there is scope for this technique to be used to improve multi-degree-of-freedom motion measurements.