Pore Structure of Modified Cyclic Silsesquioxane Thin Films Made Porous Using a Cyclodextrins-Based Porogen
Pore Structure of Modified Cyclic Silsesquioxane Thin Films Made Porous Using a Cyclodextrins-Based Porogen
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DOI：
10.1021/jp049738j
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发表时间：
2004-06
影响因子：
3.3
通讯作者：
Jin‐Heong Yim;M. Baklanov;D. Gidley;H. Peng;Hyun-Dam Jeong;L. Pu
中科院分区：
文献类型：
--
作者：
Jin‐Heong Yim;M. Baklanov;D. Gidley;H. Peng;Hyun-Dam Jeong;L. Pu
采用EP和PALS循环实验的方法研究了不同孔隙浓度的多孔改性环硅氧烷（mCSSQ）薄膜的孔隙结构。可以推导出一个似是而非的孔隙结构及其随孔隙浓度（以及孔隙度）变化的演化过程。在低浓度下，环糊精为基础的破孔分子可能是单一分散的，形成孤立的孔隙，而随着浓度的增加，破孔聚集和破孔现象变得严重。随着孔隙浓度的增加，孔隙度增大，孔径分布变宽。基于CD分子线性相互作用的趋势，可以假设一个相互连接的圆柱状孔隙形状。多孔mCSSQ薄膜的介电常数和力学性能受薄膜孔隙率的影响较大。
The pore structure of porous modified cyclic silsesquioxane (mCSSQ) thin films with different porogen concentration were investigated by means of EP and PALS as a “round robin” experiment. A plausible pore structure and its evolution as a function of porogen concentration (and hence porosity) can be deduced. At low concentration the cyclodextrin-based porogen molecules may be singly dispersed, resulting in isolated pores, while porogen agglomeration and pore collapse become severe with increasing concentration. The porosity increases and pore size distribution become broad with increasing porogen concentration. An interconnected cylinder-like pore shape can be postulated on the basis of the tendency for CD molecules to linearly interact. The dielectric constant and mechanical property of the porous mCSSQ thin films are strongly affected by the film's porosity.