Real-time single analog output for quadrature phase interferometry

Real-time single analog output for quadrature phase interferometry
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用于正交相位干涉测量的实时单模拟输出

DOI:
10.1088/1361-6501/28/4/045103
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发表时间:
2017
影响因子:
2.4
通讯作者:
E. Charlaix
E. Charlaix
中科院分区:
工程技术3区
文献类型:
--
作者:
C. Barraud;L. Garcia;B. Cross;E. Charlaix

文献摘要

被引文献

相似文献

我们提出了一种基于正交相位干涉仪的动态位移传感器,提供两个移动表面之间的差分位移的实时模拟输出。该传感器提供亚皮米分辨率,在延伸至几微米的距离范围内灵敏度基本均匀,可用于测量纳米机械测试中非常小的振荡的振幅和相位。我们通过研究纳米液膜在非常小的应变率下的流动来展示其在纳米流变学中的用途。
We present a dynamic displacement sensor based on a quadrature phase interferometer, providing a real-time analog output of the differential displacement between two mobile surfaces. The sensor offers a sub-picometer resolution with a sensitivity essentially uniform over a distance range extending to several micrometers, and can be used to measure the amplitude and phase of very small oscillations in nano-mechanical testing. We demonstrate its use in nano-rheology, by studying the flow in nanometric liquid films at very small strain rates.