Real-time single analog output for quadrature phase interferometry
Real-time single analog output for quadrature phase interferometry
复制标题
用于正交相位干涉测量的实时单模拟输出
DOI:
10.1088/1361-6501/28/4/045103
复制
发表时间:
2017
影响因子:
2.4
通讯作者:
E. Charlaix
中科院分区:
文献类型:
--
作者:
C. Barraud;L. Garcia;B. Cross;E. Charlaix
We present a dynamic displacement sensor based on a quadrature phase interferometer, providing a real-time analog output of the differential displacement between two mobile surfaces. The sensor offers a sub-picometer resolution with a sensitivity essentially uniform over a distance range extending to several micrometers, and can be used to measure the amplitude and phase of very small oscillations in nano-mechanical testing. We demonstrate its use in nano-rheology, by studying the flow in nanometric liquid films at very small strain rates.