Fabrication of diamond field-effect transistors with double NO2 hole doping and low-temperature-deposited Al2O3 gate insulator layer

Fabrication of diamond field-effect transistors with double NO2 hole doping and low-temperature-deposited Al2O3 gate insulator layer
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双NO2空穴掺杂低温沉积Al2O3栅绝缘层金刚石场效应晶体管的制备

DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
and T. Oishi
and T. Oishi
中科院分区:
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文献类型:
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作者:
M. Kasu;K. Hanada;K. Funaki;S. Masuya;T. Oshima;and T. Oishi

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