Some considerations of reduction of reference phase error in phase-stepping interferometry.
Some considerations of reduction of reference phase error in phase-stepping interferometry.
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DOI：
10.1364/ao.38.000655
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发表时间：
1999-02
期刊：
影响因子：
1.9
通讯作者：
J. Schwider;T. Dresel;B. Manzke
中科院分区：
文献类型：
--
作者：
J. Schwider;T. Dresel;B. Manzke
相位步进干涉仪中相位步进装置的定位误差和误校准会导致与测量的相位分布的两倍成比例的系统误差。我们从统一的数学角度讨论各种误差补偿相移算法的历史发展。此外，我们通过实验证明系统误差也可以事后消除。实验使用 Twyman-Green 型微透镜测试干涉仪。
Positioning errors and miscalibrations of the phase-stepping device in a phase-stepping interferometer lead to systematic errors proportional to twice the measured phase distribution. We discuss the historical development of various error-compensating phase-shift algorithms from a unified mathematical point of view. Furthermore, we demonstrate experimentally that systematic errors can also be removed a posteriori. A Twyman-Green-type microlens test interferometer was used for the experiments.