Effect of plasma nitriding on the compressive strength of multi-functional fine protrusions formed by sputter-etching of stainless steels
Effect of plasma nitriding on the compressive strength of multi-functional fine protrusions formed by sputter-etching of stainless steels
复制标题
等离子渗氮对不锈钢溅射刻蚀多功能微细突起抗压强度的影响
DOI：
10.1299/transjsme.16-00059
复制
发表时间：
2016
期刊：
影响因子：
--
通讯作者：
T. Sumomogi
中科院分区：
文献类型：
--
作者：
K. Nakasa;A. Yamamoto;Rongguang Wang;T. Sumomogi
利用射频磁控溅射装置对SUS 420 J2马氏体不锈钢和SUS 316奥氏体不锈钢进行氩离子刻蚀，在试样表面形成细小的凸起。通过使用混合有0.67 Pa氩气的0.53 Pa氮气以50 W的功率对突起施加等离子体氮化1.8 ks。对SUS 420 J2钢表面形成的直径约20 μm的锥形凸起进行显微维氏硬度测试，结果表明，经等离子渗氮处理后的试样凸起尖端的抗压强度比经溅射刻蚀处理后的试样提高了近4倍。对SUS 316钢表面尺寸小于500 nm的准柱状凸起进行纳米压痕试验，结果表明，压痕力-深度曲线分散性大，且压痕力-深度曲线的梯度变化不规则。这意味着压头在具有不同高度、尺寸和间距的突起上的不均匀接触以及突起的不连续变形随着压痕的进展而发生。尽管通常的硬度测试无法直接获得一个突起的真实抗压强度，但可以从压痕面积与硬度曲线上外推到零压痕面积的硬度来测量一组突起的变形阻力。等离子氮化突起的抗压强度几乎是溅射蚀刻突起的6倍。
Argon ion sputter-etching of SUS420J2 martensitic stainless steel and SUS316 austenitic stainless steel were carried out to form fine protrusions on the specimen surface by using a radio-frequency magnetron sputter-apparatus. Plasma-nitriding was applied to the protrusions by using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50 W for 1.8 ks. Micro-Vickers hardness tests on cone-shaped protrusions with diameter of about 20 μm formed on the SUS420J2 steel showed that the compressive strength of protrusion tip of the plasma-nitrided specimen is almost four times larger than that of the as-sputter-etched specimen. Nanoindentation tests on quasi-columnar protrusions with sizes smaller than 500 nm formed on the SUS316 steel showed not only much scatter of indentation force vs depth curves but also irregular changes of gradient of the curves. This means that an inhomogeneous contact of the indenter on the protrusions with different heights, sizes and spaces as well as a discontinuous deformation of protrusions occur with progress of indentation. Although the true compressive strength of one protrusion is not obtained directly by usual hardness tests, a measure of the deformation resistance of a group of protrusions can be obtained from the hardness that is extrapolated to zero indentation area on the indentation area vs hardness curve. The compressive resistance of the plasma-nitrided protrusions is almost six times as large as that of the as-sputter-etched ones.
阳极多孔氧化铝纳米孔形状的控制及其应用
DOI：
--
发表时间：
2004
期刊：
J.Surf.Sci.Soc.Jpn. 22
影响因子：
--
作者：
Hideki Masuda
通讯作者：
Hideki Masuda
影响因子：
10.8
作者：
Yang, Zu-Po;Ci, Lijie;Ajayan, Pulickel M.
通讯作者：
Ajayan, Pulickel M.