Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy
Large Area Fabrication of Leaning Silicon Nanopillars for Surface Enhanced Raman Spectroscopy
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DOI：
10.1002/adma.201103496
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发表时间：
2012-03-08
影响因子：
29.4
通讯作者：
Boisen, Anja
中科院分区：
文献类型：
--
作者：
Schmidt, Michael Stenbk;Hubner, Jorg;Boisen, Anja
使用简单的两步制造工艺，基于灵活的自由支撑式纳米管的具有大而均匀的拉曼增强的衬底可以使用现成的硅加工设备在较大面积上制造。
Using a simple two step fabrication process substrates with a large and uniform Raman enhancement, based on flexible free standing nanopillars can be manufactured over large areas using readily available silicon processing equipment.