Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals
Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals
复制标题
DOI：
10.1002/adfm.201903100
复制
发表时间：
2020-07-01
影响因子：
19
通讯作者：
Bao, Zhenan
中科院分区：
文献类型：
--
作者：
Ruth, Sara Rachel Arussy;Beker, Levent;Bao, Zhenan
在各种应用中，对专用压力传感器的需求越来越大。此前，电容式压力传感器已被证明具有广泛的用途，通过操纵介质层的几何形状或材料选择，可以实现高度的电势调节。然而，为了制造可调谐和可预测的传感器，首先需要开发设计和制造方法。本文提出了一种改进的制造方法，通过使用金字塔微结构介质层和叠层来实现可调、一致和可重复的压力传感器。所生产的传感器性能能够与预测的趋势相匹配。在此基础上，开发了一个基于该系统的简单模型，并对其有效性进行了实验验证。然后，在器件制造之前预测广泛的材料和微结构几何性质的模型被用来提供传感器性能的趋势。最后，证明了该方法可以有针对性地设计一种特定应用的压力传感器--体外脉搏传感。
There is an increasing demand for specialized pressure sensors in various applications. Previously, capacitive pressure sensors have been shown to have wide versatility in use, with a high degree of potential tuning possible through manipulating the geometry or material selection of the dielectric layer. However, in order to make sensors that are tunable and predictable, the design and fabrication method first needs to be developed. Presented here is an improved fabrication method to achieve tunable, consistent, and reproducible pressure sensors by using a pyramid microstructured dielectric layer along with a lamination layer. The as-produced sensor performance is able to match predicted trends. Further, a simple model based on this system is developed and its efficacy is experimentally confirmed. Then, the model to predict a wide range of material and microstructure geometric properties prior to device fabrication is used to provide trends on sensor performance. Finally, it is demonstrated that the new method can be used to targetedly design a pressure sensor for a specific application-in vitro pulse sensing.