Microfabricated high intensity discharge lamps
Microfabricated high intensity discharge lamps
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微加工高强度放电灯
DOI：
10.1116/1.580597
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
J. Racz
中科院分区：
文献类型：
--
作者：
B. Khan;R. Pinker;D. Cammack;J. Racz
高强度放电灯的小型化可以为照明行业带来更便宜、更高效和新颖的照明系统。我们正在应用用于制造集成电路的微机械加工和技术来开发这种微型灯。我们使用集成电路和微加工技术（例如光刻、蚀刻和晶圆键合）在石英基板上制造了无电极和电极高压汞放电灯。使用熔融晶圆键合将图案化的石英晶圆键合在一起。由此产生的空腔足够坚固，可以承受这些灯中的高压 (124 atm) 和高温 (1000°C)。制造含有不同量汞的灯以获得 10-175 atm 范围内的高压放电。无电极灯由工作频率为 2.45 GHz 的微波源激发，而有电极灯则由直流电压激发。无电极灯和过电压灯的灯效超过 40 流明 (lm)/W...
Miniaturization of high intensity discharge lamps can lead to cheaper, more efficient, and novel lighting systems for the lighting industry. We are applying micromachining and techniques used for manufacturing integrated circuits, to develop such miniature lamps. We have fabricated electrodeless and electroded high-pressure mercury discharge lamps in quartz substrates using integrated circuit and micromachining techniques, such as photolithography, etching, and wafer bonding. Patterned quartz wafers were bonded together using fusion wafer bonding. The resulting cavities are strong enough to withstand the high pressures (124 atm) and high temperatures (1000 °C) in these lamps. Lamps containing varying amounts of mercury were fabricated to obtain high-pressure discharges in the range of 10–175 atm. The electrodeless lamps were excited by a microwave source, operating at 2.45 GHz and the electroded lamps with a dc voltage. Lamp efficacies over 40 lumens (lm)/W were obtained for the electrodeless lamps and ov...