Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source
Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source
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配备激光产生等离子体源的亚 100 nm 分辨率掠入射软 X 射线显微镜
DOI：
10.1143/jjap.31.3477
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发表时间：
1992
影响因子：
1.5
通讯作者：
T. Onuki
中科院分区：
文献类型：
--
作者：
S. Aoki;Taro Ogata;S. Sudo;T. Onuki
使用掠入射镜和激光产生的等离子体源构建了高分辨率软 X 射线显微镜。将 Nd-YAG 脉冲激光 (1.064 µm) 聚焦到铝靶上，产生波长超过 4 nm 的软 X 射线。激光束能量为1.4 J，脉冲宽度为8 ns。 Wolter I 型镜用作物镜，环形镜用作聚光镜。物镜的放大倍数为20。使用全息板作为检测器。单次拍摄即可实现约 40 nm 的分辨率。
A high-resolution soft X-ray microscope was constructed using grazing incidence mirrors and a laser-produced plasma source. An Nd-YAG pulse laser (1.064 µm) was focused onto an aluminum target to produce soft X-rays above 4 nm in wavelength. The beam energy of the laser was 1.4 J, with a pulse width of 8 ns. The Wolter type-I mirror was used as an objective mirror and the toroidal mirror as a condenser. The magnification of the objective was 20. A holographic plate was used as a detector. Resolution of about 40 nm was achieved with a single shot.