Optically transparent composite diamond/Ti electrodes
Optically transparent composite diamond/Ti electrodes
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DOI：
10.1016/j.carbon.2017.04.035
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发表时间：
2017-08
期刊：
影响因子：
10.9
通讯作者：
P. Ashcheulov;A. Taylor;J. More-Chevalier;A. Kovalenko;Z. Remeš;J. Drahokoupil;P. Hubík;L. Fekete;L. Klimša;J. Kopeček;J. Remiášová;M. Kohout;O. Frank;L. Kavan;V. Mortet
中科院分区：
文献类型：
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作者：
P. Ashcheulov;A. Taylor;J. More-Chevalier;A. Kovalenko;Z. Remeš;J. Drahokoupil;P. Hubík;L. Fekete;L. Klimša;J. Kopeček;J. Remiášová;M. Kohout;O. Frank;L. Kavan;V. Mortet
在纳米金刚石薄膜的电光应用中，实现高的光学透明度和低的电阻率是非常重要的。然而，目前制造具有合理导电性的高透明非镉薄膜仍然是一个挑战——任何导电性的增加都会同时降低透明度。在这里，我们报告了基于掺硼纳米晶金刚石（B-NCD）薄膜和Ti网格的高导电性和高透明电极的制造。我们研究了可变硼含量和厚度的B-NCD薄膜，以确定更好的电学和光学特性。通过在玻璃基板和B-NCD层之间集成薄纳米结构ti栅格，获得了片电阻为200 Ω/sq，光学透明度为80%的复合电极。
It is important for electro-optical applications of nanocrystalline diamond (NCD) films to achieve high optical transparency with low electrical resistivity. However, currently fabrication of highly transparent NCD films with reasonable electrical conductivity remains a challenge – any increase in conductivity simultaneously reduces transparency. Here, we report on fabrication of highly conductive and yet highly transparent electrodes based on boron-doped nanocrystalline diamond (B-NCD) films and Ti grids. We studied B-NCD films with variable boron content and thickness to determine preferable electrical and optical characteristics. Composite electrodes with a sheet resistance of 200 Ω/sq and optical transparency of 80% have been obtained by the integration of a thin nanostructured Ti-grid, sandwiched between the glass substrate and B-NCD layer.